Microwave perormance of very thin YBa2Cu3O7-dfilms determined from microwave screening measurements

The microwave perfonrance of very thin (10-200nm) High-Tc superconducting thin films as used for microelectronic applications cannot be charterized satisfactorily by the well-known microwave resonator technique due to the disadvantageous dIL raio. It is shown tha the microwave performance of these films can be deduced from the microwave penetration depth, which is determined absolutely and with high accurcy from a measurement of the screening attenuafion at 82-87 GHz.