Title :
VLSI design and fabrication for liquid crystal on silicon
Author_Institution :
Dept. of Electron. & Electr. Eng., Edinburgh Univ., UK
Abstract :
This paper attempts a very brief review of the principles of, and some recent advances in, the design and custom fabrication of silicon chips for use with liquid crystals in spatial light modulators and microdisplays
Keywords :
spatial light modulators; CMOS active backplane; VLSI design; buffered SRAM pixel drive; custom fabrication; liquid crystal on silicon; microdisplays; planarisation; silicon chips; smart pixel; spatial light modulators;
Conference_Titel :
Microdisplay and Smart Pixel Technologies (Ref. No. 2000/006), IEE Seminar on
Conference_Location :
London
DOI :
10.1049/ic:20000026
