Title :
Tutorial B: Introduction to optical metrology
Author :
Chan, Vincent ; Huang, Howard Yuanhao
Abstract :
In this tutorial we will have a brief overview of the basic methods and applications of optical metrology. We will discuss its uses, limitations and how it is typically used in industry. The following topics will be covered: · Background theory · Types of measurements · GD & T · Types of sensors · Limitations of optical measurements · Industrial applications This tutorial is best suited to engineers new to optical metrology.
Keywords :
optical sensors; reviews; industrial application; optical metrology; optical sensors; tutorial;
Conference_Titel :
Optomechatronic Technologies (ISOT), 2010 International Symposium on
Conference_Location :
Toronto, ON
Print_ISBN :
978-1-4244-7684-8
DOI :
10.1109/ISOT.2010.5687377
