Title :
Characterization of the influence of strain on the optical properties of waveguides and microresonators in silicon-on-insulator technology
Author :
Westerveld, W.J. ; Harmsma, P.J. ; Schmits, R. ; Tabak, E. ; Pozo, J. ; Urbach, H.P. ; Yousefi, M.
Author_Institution :
Opt. Res. Group, Delft Univ. of Technol., Delft, Netherlands
Abstract :
We are the first to present experimental results and understanding of the effects of an applied strain S in the effective index ne in a SOI-PIC. We fabricated a set of long racetrack-shaped ring resonators (length 1040 μm, bend radius 25 μm, circumference l), oriented along the [110] crystalline direction, consisting of a waveguide with dimensions of 1000 x 300 nm. Having a long racetrack enables us to neglect the effects of the bends. We excite the fundamental TM mode using a multimode interference (MMI) coupler.
Keywords :
integrated optics; light interference; micro-optomechanical devices; micromechanical resonators; optical couplers; optical resonators; optical waveguides; refractive index; silicon-on-insulator; strain measurement; Si; applied strain; bend radius; effective index; fundamental TM mode; microresonators; multimode interference coupler; optical properties; optical waveguides; racetrack-shaped ring resonators; radius 25 mum; silicon-on-insulator technology; size 1000 mum; Indexes;
Conference_Titel :
Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
Conference_Location :
Munich
Print_ISBN :
978-1-4577-0533-5
Electronic_ISBN :
Pending
DOI :
10.1109/CLEOE.2011.5943062
