DocumentCode :
2069630
Title :
Broad-area InGaNAs/GaAs quantum-well lasers in the 1200 nm range
Author :
Yang, Hung-Pin D. ; Shih, Chih-Tsung ; Yang, Su-Mei ; Lee, Tsin-Dong
Author_Institution :
Electron. & Optoelectron. Res. Labs., Ind. Technol. Res. Inst., Hsinchu
fYear :
2009
fDate :
26-29 May 2009
Firstpage :
820
Lastpage :
826
Abstract :
Broad-area InGaNAs/GaAs quantum-well (QW) edge-emitting lasers on GaAs substrates in the 1200 nm range are reported. The epitaxial layers of the InGaNAs/GaAs QW laser wafers were grown on n+-GaAs substrates by using metal-organic chemical vapor deposition (MOCVD). The thickness of the InGaNAs/GaAs QW layers is 70 Aring/1200 Aring. The indium content (x) of the InxGa1-xNyAs1-y QW layers is estimated to be 0.35 to 0.36, while the nitrogen content (y) is estimated to be 0.006 to 0.008. More indium content (In) and nitrogen content (N) in the InGaNAs QW layer enables the laser emission up to 1300 nm range. The epitaxial layer quality, however, is limited by the strain in the grown layer. The devices were made with different ridge widths from 5 to 50 mum. A very low threshold current density (Jth) of 80 A/cm2 has been obtained for the 50 mumtimes500 mum LD. A number of InGaNAs/GaAs epi-wafers were made into broad-area LDs. A maximum output power of 95 mW was measured for the broad-area InGaNAs/GaAs QW LDs. The variations in the output powers of the broad-area LDs are mainly due to strain the InGaNAs QW layers.
Keywords :
III-V semiconductors; chemical vapour deposition; gallium arsenide; gallium compounds; indium compounds; laser beams; nitrogen compounds; quantum well lasers; semiconductor epitaxial layers; semiconductor quantum wells; GaAs; InGaNAs-GaAs; QW laser wafer; edge-emitting laser; epitaxial layer quality; laser emission; low threshold current density; metal-organic chemical vapor deposition; power 95 mW; semiconductor quantum-well laser; size 5 mum to 50 mum; wavelength 1200 nm; Capacitive sensors; Chemical lasers; Chemical vapor deposition; Epitaxial layers; Gallium arsenide; Indium; Nitrogen; Power generation; Quantum well lasers; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Components and Technology Conference, 2009. ECTC 2009. 59th
Conference_Location :
San Diego, CA
ISSN :
0569-5503
Print_ISBN :
978-1-4244-4475-5
Electronic_ISBN :
0569-5503
Type :
conf
DOI :
10.1109/ECTC.2009.5074106
Filename :
5074106
Link To Document :
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