Title :
Energy trapping in HBARS based on cubic and 3m crystals
Author :
Alekseev, S.G. ; Kotelyanskii, I.M. ; Mansfeld, G.D. ; Polzikova, N.I.
Author_Institution :
Inst. of Radioeng. & Electron., RAS, Moscow
Abstract :
In this paper, the analytic solution of the problem of acoustic energy trapping in a microwave composite resonator containing a thick cubic or 3 m crystal plate with a deposited piezoelectric film and electrodes is presented. Thus the problem of energy trapping in composite microwave HBARs is solved analytically. The important feature of the calculation of such structures for microwaves is the necessity of taking into account wave properties of piezoelectric films and electrodes because their thickness is comparable with wavelength in the material.
Keywords :
acoustic materials; acoustic microwave devices; acoustic resonators; bulk acoustic wave devices; crystal structure; electrodes; piezoelectric thin films; 3 m; acoustic energy trapping; crystal plate; cubic crystal; electrodes; high overtone bulk acoustic wave resonators; microwave composite resonator; piezoelectric film; wave properties; Acoustic devices; Acoustic waves; Boundary conditions; Crystals; Electrodes; Electron traps; Frequency; Partial differential equations; Piezoelectric films; Q factor;
Conference_Titel :
Electronics and Photonics, 2006. MEP 2006. Multiconference on
Conference_Location :
Guanajuato
Print_ISBN :
1-4244-0627-7
Electronic_ISBN :
1-4244-0628-5
DOI :
10.1109/MEP.2006.335636