Title :
Non-linear transient current in thin polyimide films prepared by vapor deposition polymerization
Author :
Yoda, S. ; Sonehara, S. ; Miyairi, K.
Author_Institution :
Dept. of Electr. & Electron. Eng., Shinshu Univ., Nagano, Japan
Abstract :
Two kinds of thin polyimide films are prepared by vapor deposition polymerization. One is annealed in air, and the other is annealed in a vacuum during imidization procedure. We have investigated electrical conduction in the two kinds of samples with low frequency voltage, and the difference between them have been discussed from the view point of ionic conduction. The samples annealed in air shows lead of current phase that due to the accumulated ionic space charge in the vicinity of the Al oxide layer at the Al-polyimide boundary. The samples annealed in a vacuum show lower conductivity and an anomalous current peak. The mechanism responsible for the current peak has been discussed in terms of diffusion and drift of space charges accumulated near the electrodes
Keywords :
MIM structures; annealing; diffusion; electric current; insulating thin films; ionic conductivity; organic insulating materials; polymer films; polymerisation; space charge; vapour deposited coatings; Al oxide layer; Al-Al2O3; Al-polyimide boundary; MIM structure; air annealing; anomalous current peak; diffusion; electrical conduction; imidization procedure; ionic conduction; ionic space charge accumulation; low frequency voltage; nonlinear transient current; thin polyimide films; vacuum annealing; vapor deposition polymerization; Annealing; Chemical vapor deposition; Conductivity; Electrodes; Frequency; Lead compounds; Low voltage; Polyimides; Polymer films; Space charge;
Conference_Titel :
Electrical Insulation and Dielectric Phenomena, 1997. IEEE 1997 Annual Report., Conference on
Conference_Location :
Minneapolis, MN
Print_ISBN :
0-7803-3851-0
DOI :
10.1109/CEIDP.1997.634576
