Dynamic analysis of coupling system of multi-axis force sensor structure and its measuring circuits

The control precision of the maglev system based on the force control should be evaluated by the dynamic performance of coupling system of multi-axis force sensor structure and its measuring circuits. The dynamical model of the coupling system is established in consideration of the dynamic characteristics of multi-axis force sensor structure and its measuring circuits. The amplitude-frequency curves of the coupling system are obtained through simulation, and its curves are modified in order to make coupling system get a better dynamic performance. The results show that under the action of excitations, amplitude error of the coupling system unmodified reach to 9% when the frequencies of the excitation are lower than 330 Hz, and its dynamic characteristics are poor; Amplitude error of the coupling system modified is less than 1% and the coupling system has a good dynamic performance which can meet the lossless measuring conditions.