• DocumentCode
    2071803
  • Title

    Intermetallic reaction between electroplated indium and silver layers

  • Author

    Wang, Pin J. ; Kim, Jong S. ; Lee, Chin C.

  • Author_Institution
    Electr. Eng. & Comput. Sci., Mater. & Manuf. Technol., Univ. of California, Irvine, CA
  • fYear
    2009
  • fDate
    26-29 May 2009
  • Firstpage
    1317
  • Lastpage
    1321
  • Abstract
    Reaction of indium (In) and silver (Ag) during the electroplating process of indium over thick silver layer was investigated. It is found that the plated In atoms reacts with Ag to form AgIn2 intermetallic compound at room temperature. Indium is commonly used in electronic industries to bond delicate devices due to its unique ductility and low melting temperature. In this study, copper (Cu) substrates were electroplated with 60 mum thick Ag layer, followed by electroplating In layer with thickness of 5 mum and 10 mum, respectively, at room temperature. To investigate chemical reaction between In and Ag, the microstructure and composition on the surface and cross section of samples were observed using scanning electron microscope (SEM) with energy dispersive X-ray spectroscopy (EDX). X-ray diffraction method (XRD) was also employed for phase identification. All of results clearly indicate that indium atoms react with underlying Ag to form AgIn2 during the plating process. After the sample was stored at room temperature in air for one day, AgIn2 grew to 5 mum in thickness. With longer storage time, AgIn2 continued to grow until all indium atoms were consumed. The indium layer, thus, disappeared and could barely be detected by XRD.
  • Keywords
    X-ray chemical analysis; X-ray diffraction; electroplating; indium alloys; metallisation; scanning electron microscopy; silver alloys; EDX; In-Ag; SEM; X-ray diffraction method; XRD; electroplated layer; electroplating process; energy dispersive X-ray spectroscopy; intermetallic compound; intermetallic reaction; scanning electron microscope; Atomic layer deposition; Bonding; Copper; Electronics industry; Indium; Intermetallic; Scanning electron microscopy; Silver; Temperature; X-ray scattering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Components and Technology Conference, 2009. ECTC 2009. 59th
  • Conference_Location
    San Diego, CA
  • ISSN
    0569-5503
  • Print_ISBN
    978-1-4244-4475-5
  • Electronic_ISBN
    0569-5503
  • Type

    conf

  • DOI
    10.1109/ECTC.2009.5074182
  • Filename
    5074182