DocumentCode
2071803
Title
Intermetallic reaction between electroplated indium and silver layers
Author
Wang, Pin J. ; Kim, Jong S. ; Lee, Chin C.
Author_Institution
Electr. Eng. & Comput. Sci., Mater. & Manuf. Technol., Univ. of California, Irvine, CA
fYear
2009
fDate
26-29 May 2009
Firstpage
1317
Lastpage
1321
Abstract
Reaction of indium (In) and silver (Ag) during the electroplating process of indium over thick silver layer was investigated. It is found that the plated In atoms reacts with Ag to form AgIn2 intermetallic compound at room temperature. Indium is commonly used in electronic industries to bond delicate devices due to its unique ductility and low melting temperature. In this study, copper (Cu) substrates were electroplated with 60 mum thick Ag layer, followed by electroplating In layer with thickness of 5 mum and 10 mum, respectively, at room temperature. To investigate chemical reaction between In and Ag, the microstructure and composition on the surface and cross section of samples were observed using scanning electron microscope (SEM) with energy dispersive X-ray spectroscopy (EDX). X-ray diffraction method (XRD) was also employed for phase identification. All of results clearly indicate that indium atoms react with underlying Ag to form AgIn2 during the plating process. After the sample was stored at room temperature in air for one day, AgIn2 grew to 5 mum in thickness. With longer storage time, AgIn2 continued to grow until all indium atoms were consumed. The indium layer, thus, disappeared and could barely be detected by XRD.
Keywords
X-ray chemical analysis; X-ray diffraction; electroplating; indium alloys; metallisation; scanning electron microscopy; silver alloys; EDX; In-Ag; SEM; X-ray diffraction method; XRD; electroplated layer; electroplating process; energy dispersive X-ray spectroscopy; intermetallic compound; intermetallic reaction; scanning electron microscope; Atomic layer deposition; Bonding; Copper; Electronics industry; Indium; Intermetallic; Scanning electron microscopy; Silver; Temperature; X-ray scattering;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference, 2009. ECTC 2009. 59th
Conference_Location
San Diego, CA
ISSN
0569-5503
Print_ISBN
978-1-4244-4475-5
Electronic_ISBN
0569-5503
Type
conf
DOI
10.1109/ECTC.2009.5074182
Filename
5074182
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