DocumentCode
2072131
Title
Micromachined acoustic device for diagnostic applications
Author
Pantazis, Alexandros K. ; Gizeli, Electra ; Konstantinidis, Georgios
Author_Institution
Biol. Dept., Univ. of Crete, Heraklion, Greece
fYear
2010
fDate
3-5 Nov. 2010
Firstpage
1
Lastpage
4
Abstract
Monolithic integrated lab-on-a-chip systems are gaining more and more attention. The ability of having everything on a single chip allows for miniaturization and flexibility. However, some of the currently applied devices are based on materials non-compatible with semiconductor processing techniques; in this paper, a micromachined device based on a high-quality semiconductor material is presented and evaluated for its potential to diagnostics.
Keywords
III-V semiconductors; bioMEMS; bioacoustics; gallium compounds; lab-on-a-chip; patient diagnosis; semiconductor materials; GaN; diagnostic applications; high-quality semiconductor material; micromachined acoustic device; monolithic integrated lab-on-a-chip systems; semiconductor processing; Drugs; Epitaxial growth; Polymers;
fLanguage
English
Publisher
ieee
Conference_Titel
Information Technology and Applications in Biomedicine (ITAB), 2010 10th IEEE International Conference on
Conference_Location
Corfu
Print_ISBN
978-1-4244-6559-0
Type
conf
DOI
10.1109/ITAB.2010.5687626
Filename
5687626
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