W-band tunable reflective type phase shifter based on waveguide-mounted RF MEMS

Author

Psychogiou, D. ; Hesselbarth, J. ; Li, Y. ; Kuehne, S. ; Hierold, C.

Author_Institution

Lab. for Electromagn. Fields & Microwave Electron. (IFH), ETH Zurich, Zurich, Switzerland

fYear

2011

fDate

15-16 Sept. 2011

Firstpage

85

Lastpage

88

Abstract

A novel concept for a continuously variable W-band phase shifter is proposed. It is based on a ridge waveguide resonator tuned by MEMS-actuated conductive fingers that interact with the fields beneath the ridge. The rotation of anti-parallel oriented MEMS conductive fingers of about half wavelength size realize a distributed interaction with the purposely structured waveguide ridge. In such a way, large transmission phase variations are obtained. By cascading an additional resonator and a waveguide short, a reflection type phase shifter is created with a single MEMS. For MEMS finger deflection angles between 0° and 7.5°, this device realizes reflection phase shift variation of 381° and a reflection coefficient magnitude of better than -1.65 dB at a frequency of 106.5 GHz. This corresponds to a figure of merit of 230°/dB.

Keywords

micromechanical resonators; microwave phase shifters; microwave resonators; ridge waveguides; MEMS-actuated conductive finger; W-band tunable reflective type phase shifter; antiparallel oriented MEMS conductive finger; continuously variable W-band phase shifter; phase variation; reflection type phase shifter; ridge waveguide resonator; waveguide-mounted RF MEMS; wavelength size; Fingers; Micromechanical devices; Optical waveguides; Phase shifters; Radio frequency; Reflection; RF MEMS; millimeter-wave phase shifter; tunable resonator;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Workshop Series on Millimeter Wave Integration Technologies (IMWS), 2011 IEEE MTT-S International

Conference_Location

Sitges

Print_ISBN

978-1-61284-963-8

Type

conf

DOI

10.1109/IMWS3.2011.6061894

Filename

6061894