Title :
Self-healing breakdown characteristics of polyimide thin films-effect of ambient gas on breakdown characteristics
Author :
Muramoto, Yuji ; Nagao, Masayuki ; Kosaki, Masamitsu
Author_Institution :
Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Technol., Japan
Abstract :
We have been studying the breakdown characteristics of polyimide (PI) thin films to try and take advantage of self-healing breakdown. This paper focuses on the effect of ambient gas (SF6, N2 , O2 and dry air) on breakdown characteristics of PI thin films. At room temperature, electric strength (Fb) in SF6 is higher than in other gases. The Fb in dry air fell significantly just after the polarity reversal of the applied voltage and then gradually increased with the number of breakdowns. However, the Fb in SF6 and N2 retained nearly the same value after the polarity reversal. The Fb in the mixed gas of N2 and O2 fell after polarity reversal and decreased with increase of oxygen concentration. This is probably due to the fact that the ambient gas affects space-charge formation in PI thin films, Because it is a porous structure, the possibility of breakdown characteristics of ambient gas-PI thin film composite system may be taken into account
Keywords :
electric breakdown; electric strength; insulating thin films; polymer films; space charge; N2; O2; SF6; ambient gas effects; electric strength; insulating thin films; polarity reversal; polyimide thin films; self-healing breakdown characteristics; space-charge formation; Anodes; Breakdown voltage; Dielectric thin films; Electric breakdown; Gases; Sulfur hexafluoride; Temperature dependence; Temperature measurement; Transistors; Vacuum breakdown;
Conference_Titel :
Electrical Insulation and Dielectric Phenomena, 1997. IEEE 1997 Annual Report., Conference on
Conference_Location :
Minneapolis, MN
Print_ISBN :
0-7803-3851-0
DOI :
10.1109/CEIDP.1997.634583
