DocumentCode :
2073083
Title :
Thermal reliability & IMC behavior of low cost alternative Au-Ag-Pd wire bonds to Al metallization
Author :
Cho, Jong-Soo ; Jeong, Hee-Suk ; Moon, Jeong-Tak ; Yoo, Se-Jin ; Seo, Jae-Seok ; Lee, Seung-Mi ; Ha, Seung-Weon ; Her, Eun-Kyu ; Kang, Suk-Hoon ; Oh, Kyu-Hwan
Author_Institution :
MK Electron Co., Ltd., Yongin
fYear :
2009
fDate :
26-29 May 2009
Firstpage :
1569
Lastpage :
1573
Abstract :
To reduce material cost of Au bonding wire, Au-Ag alloy wire had been tried to use in electronic device, in alternative for Au wire. Nevertheless, Au-Ag alloy wire had not been applied to device due to failure problem during high humidity reliability test, like PCT(pressure cooker test) for a while. Recently, as the technology adding Pd element to conventional Au-Ag was developed, corrosive failure problem at interface between wire ball and Al pad (metallization) was solved in PCT. Finally, mass production of Au-Ag-Pd wire starts to grow up. The study on reliability and behavior of intermetallic compounds (IMC) have not been performed in terms of thermal aging or HTST (high temperature storage life test) yet. This study investigates IMC & voids behavior between Au-Ag-Pd wire and Al metallization under thermal aged condition (175´C). The chemical compositions of gold wires tested are 99.99% Au, Au-30wt.%Ag and Au-30wt.%Ag-5.5%wt.Pd, respectively. The wires are bonded on Al metallization by using thermosonic bonder, IMC behavior was characterized by FIB (focused ion beam), TEM (transmission electron microscope), EDS (energy dispersive X-ray spectrometer) The findings reveal that, interfacial reliability between Au-Ag-Pd wire and Al metallization is considerably improved, compared with 4N Au or Au-30%Ag, growth of IMCs as well as the voids formation are significantly suppressed.
Keywords :
X-ray chemical analysis; ageing; aluminium; corrosion; focused ion beam technology; gold alloys; integrated circuit metallisation; integrated circuit reliability; palladium alloys; silver alloys; transmission electron microscopes; Al; AuAgPd; IMC behavior; aluminum pad; chemical compositions; corrosive failure problem; energy dispersive X-ray spectrometer; focused ion beam; high temperature storage life test; humidity reliability test; interfacial reliability; intermetallic compounds; mass production; metallization; pressure cooker test; thermal aging; thermal reliability; thermosonic bonder; transmission electron microscope; wire ball; wire bonds; Aging; Bonding; Costs; Gold alloys; Humidity; Intermetallic; Mass production; Metallization; Testing; Wire;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Components and Technology Conference, 2009. ECTC 2009. 59th
Conference_Location :
San Diego, CA
ISSN :
0569-5503
Print_ISBN :
978-1-4244-4475-5
Electronic_ISBN :
0569-5503
Type :
conf
DOI :
10.1109/ECTC.2009.5074222
Filename :
5074222
Link To Document :
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