DocumentCode :
2073529
Title :
Direct molding Chalcogenide glass waveguides using thermal nanoimprint lithography with a soft PDMS stamp
Author :
Han, Ting ; Madden, Steve ; Bulla, Douglas ; Debbarma, Sukanta ; Luther-Davies, Barry
Author_Institution :
Laser Phys. Center, Australian Nat. Univ., Canberra, ACT, Australia
fYear :
2011
fDate :
22-26 May 2011
Firstpage :
1
Lastpage :
1
Abstract :
In this paper, we report the first thermal nano-imprint fabrication of low loss As2S3 Chalocgenide glass waveguides. As2S3 rib waveguides 2-4μm wide and 1μm high with losses below 0.5dB/cm at 1550nm were thermally embossed by a soft stamp made from Polydimethylsiloxane (PDMS) on a 100mm wafer scale.
Keywords :
arsenic compounds; chalcogenide glasses; moulding; nanolithography; rib waveguides; soft lithography; sulphur compounds; As2S3; chalcogenide glass waveguides; direct molding; polydimethylsiloxane; rib waveguides; soft PDMS stamp; thermal nanoimprint fabrication; thermal nanoimprint lithography;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
Conference_Location :
Munich
ISSN :
Pending
Print_ISBN :
978-1-4577-0533-5
Electronic_ISBN :
Pending
Type :
conf
DOI :
10.1109/CLEOE.2011.5943254
Filename :
5943254
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2073529
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