• DocumentCode
    2073529
  • Title

    Direct molding Chalcogenide glass waveguides using thermal nanoimprint lithography with a soft PDMS stamp

  • Author

    Han, Ting ; Madden, Steve ; Bulla, Douglas ; Debbarma, Sukanta ; Luther-Davies, Barry

  • Author_Institution
    Laser Phys. Center, Australian Nat. Univ., Canberra, ACT, Australia
  • fYear
    2011
  • fDate
    22-26 May 2011
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    In this paper, we report the first thermal nano-imprint fabrication of low loss As2S3 Chalocgenide glass waveguides. As2S3 rib waveguides 2-4μm wide and 1μm high with losses below 0.5dB/cm at 1550nm were thermally embossed by a soft stamp made from Polydimethylsiloxane (PDMS) on a 100mm wafer scale.
  • Keywords
    arsenic compounds; chalcogenide glasses; moulding; nanolithography; rib waveguides; soft lithography; sulphur compounds; As2S3; chalcogenide glass waveguides; direct molding; polydimethylsiloxane; rib waveguides; soft PDMS stamp; thermal nanoimprint fabrication; thermal nanoimprint lithography;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
  • Conference_Location
    Munich
  • ISSN
    Pending
  • Print_ISBN
    978-1-4577-0533-5
  • Electronic_ISBN
    Pending
  • Type

    conf

  • DOI
    10.1109/CLEOE.2011.5943254
  • Filename
    5943254
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2073529