DocumentCode
2073653
Title
Carbon nanotube growth for GHz devices
Author
Li, Shengdong ; Yu, Zhen ; Gadde, Goldie ; Burke, Peter J. ; Tang, W.C.
Author_Institution
Electr. Eng. & Comput. Sci., California Univ., Irvine, CA, USA
Volume
1
fYear
2003
fDate
12-14 Aug. 2003
Firstpage
256
Abstract
Horizontally oriented single walled carbon nanotubes are grown with CVD between lithographically defined catalyst sites. Single walled carbon nanotubes up to 60 μm in length are grown using methane as the feedstock. The nanoparticle catalyst is deposited from a newly developed aqueous solution requiring only photoresist and optical lithography. Carbon nanotube Y-junctions are also observed and characterized.
Keywords
carbon nanotubes; chemical vapour deposition; high-frequency effects; nanotechnology; photoresists; 60 micron; C; CVD; GHz devices; carbon nanotube Y-junctions; carbon nanotube growth; horizontally oriented single walled carbon nanotubes; lithography; methane; nanoparticle catalyst; optical lithography; photoresist; Carbon nanotubes; Circuits; Contacts; Electric variables measurement; Frequency; Inductance measurement; Kinetic theory; Lithography; Nanoparticles; Resists;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology, 2003. IEEE-NANO 2003. 2003 Third IEEE Conference on
Print_ISBN
0-7803-7976-4
Type
conf
DOI
10.1109/NANO.2003.1231764
Filename
1231764
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