Title :
Carbon nanotube growth for GHz devices
Author :
Li, Shengdong ; Yu, Zhen ; Gadde, Goldie ; Burke, Peter J. ; Tang, W.C.
Author_Institution :
Electr. Eng. & Comput. Sci., California Univ., Irvine, CA, USA
Abstract :
Horizontally oriented single walled carbon nanotubes are grown with CVD between lithographically defined catalyst sites. Single walled carbon nanotubes up to 60 μm in length are grown using methane as the feedstock. The nanoparticle catalyst is deposited from a newly developed aqueous solution requiring only photoresist and optical lithography. Carbon nanotube Y-junctions are also observed and characterized.
Keywords :
carbon nanotubes; chemical vapour deposition; high-frequency effects; nanotechnology; photoresists; 60 micron; C; CVD; GHz devices; carbon nanotube Y-junctions; carbon nanotube growth; horizontally oriented single walled carbon nanotubes; lithography; methane; nanoparticle catalyst; optical lithography; photoresist; Carbon nanotubes; Circuits; Contacts; Electric variables measurement; Frequency; Inductance measurement; Kinetic theory; Lithography; Nanoparticles; Resists;
Conference_Titel :
Nanotechnology, 2003. IEEE-NANO 2003. 2003 Third IEEE Conference on
Print_ISBN :
0-7803-7976-4
DOI :
10.1109/NANO.2003.1231764
