Sub-nanometer stepping drive of surface acoustic wave motor

Author

Shigematsu, Takashi ; Kurosawa, Minoru Kuribayashi ; Asai, Katsuhiko

Author_Institution

Dept. of Adv. Appl. Electron., Tokyo Inst. of Technol., Yokohama, Japan

Volume

1

fYear

2003

fDate

12-14 Aug. 2003

Firstpage

299

Abstract

Ranging down to sub-nanometer stepping drives of a surface acoustic wave (SAW) motor is reported. The SAW motor demonstrated the high-resolution motion along with quick positioning ability, 0.2 milliseconds interval in this report, over centimeter-level long stroke. The step size was easily changed, by a number of driving waves, from sub-nanometer to several hundred nanometers in which the step period was 0.2 ms. We investigated the motion resolution in relation to driving conditions. Appropriately adjusting the driving condition according to the investigation result, 0.5 nm stepping motions were achieved. The improvement of the resolution enhanced the actuator performance for precise positioning.

Keywords

Rayleigh waves; drives; stepping motors; surface acoustic wave devices; surface acoustic waves; 0.2 ms; 0.5 nm; SAW motor; actuator; driving waves; high resolution motion; nanometre stepping motions; positioning; sub nanometer stepping drive; surface acoustic wave motor; Acoustic waves; Actuators; Radio frequency; Rails; Silicon; Stators; Steel; Surface acoustic wave devices; Surface acoustic waves; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2003. IEEE-NANO 2003. 2003 Third IEEE Conference on

Print_ISBN

0-7803-7976-4

Type

conf

DOI

10.1109/NANO.2003.1231777

Filename

1231777