Integrated optical nanosystems with an embedded in-line thermo-optic modulator

A feasibility study and the design of an in-line, integrated thermo-optic modulator is presented here. In our device structure, we propose to utilize vertically-stratified multi layers to implement a Fabry-Perot etalon, as the actual modulator. We propose to realize these multilayers as nanometer-sized, etched and filled trenches realized in the waveguide body. The use of nanoelectronic fabrication facilities, like electron beam lithography; reactive ion etching and trench-filling deposition processes, allows compatibility with many standard IC fabrication processes. The modeling and simulation of the proposed device have been carried out here.