Title :
Structuring of 2D photonic crystal on InP membranes as polarizing element for optical MEMS based sensor systems
Author :
Zamora, R. ; Kusserow, T. ; Wulf, M. ; Kanwar, K. ; Witzigmann, B. ; Hillmer, H.
Author_Institution :
Inst. of Nanostruct. Technol. & Analytics (INA), Univ. of Kassel, Kassel, Germany
Abstract :
Narrow band Fabry-Pérot MEMS filters are investigated for the integration in optical fiber sensor networks. We present a technological process to implement a 2D photonic crystal (PhC) structure on an InP membrane, in order to provide an InP/air-gap Fabry-Pérot filter with polarization selectivity. The capabilities and limitations of Focused Ion Beam (FIB) lithography combined with Reactive Ion Etching (RIE) are investigated to fabricate the PhC structure. Special focus is given to the etching rate of the required hard mask, utilized in the FIB lithography, to determine the optimal thickness to produce high quality structures. Additionally, the mechanical properties of the PhC membrane and the influence on the basic filter structure are investigated.
Keywords :
III-V semiconductors; distributed sensors; fibre optic sensors; focused ion beam technology; ion beam lithography; membranes; microsensors; optical fibre networks; photonic crystals; sputter etching; 2D photonic crystal; FIB lithography; InP; InP membrane; Polarizing Element; focused ion beam lithography; narrow band Fabry-Perot MEMS filter; optical MEMS based sensor system; optical fiber sensor networks; reactive ion etching; Air gaps; Biomembranes; Indium phosphide; Monitoring; Optical diffraction; Optical polarization; FIB lithography; Fabry-Pérot filter; Photonic Crystals; RIE; fiber based sensor networks; polarization selectivity;
Conference_Titel :
Networked Sensing Systems (INSS), 2010 Seventh International Conference on
Conference_Location :
Kassel
Print_ISBN :
978-1-4244-7911-5
Electronic_ISBN :
978-1-4244-7910-8
DOI :
10.1109/INSS.2010.5572160
