DocumentCode
2074258
Title
A coupled circuit and device simulator for design of RF MEMS VCOs
Author
Behera, Manas ; De, Sudipto ; Aluru, Narayan ; Mayaram, Kartikeya
Author_Institution
Sch. of Electr. Eng. & Comput. Sci., Oregon State Univ., Corvallis, OR, USA
Volume
1
fYear
2003
fDate
12-14 Aug. 2003
Firstpage
347
Abstract
A new coupled circuit and electrostatic/mechanical simulator is presented for the design of RF MEMS VCOs. The numerical solution of device level equations is used to accurately compute the capacitance of the MEMS capacitor. This coupled with a circuit simulator facilitates the simulation of circuits incorporating MEMS capacitors. Simulations of a 2.4 GHz VCO implemented in a UP 0.5 μm CMOS technology show good agreement with experimentally observed behavior.
Keywords
coupled circuits; micromechanical devices; voltage-controlled oscillators; 0.5 micron; 2.4 GHz; CMOS technology; HP techniques; MEMS capacitor; RF MEMS VCO; coupled circuit; device simulator; electrostatic simulator; mechanical simulator; numerical solution; CMOS technology; Capacitance; Capacitors; Circuit simulation; Computational modeling; Coupling circuits; Electrostatics; Equations; Micromechanical devices; Radiofrequency microelectromechanical systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology, 2003. IEEE-NANO 2003. 2003 Third IEEE Conference on
Print_ISBN
0-7803-7976-4
Type
conf
DOI
10.1109/NANO.2003.1231789
Filename
1231789
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