Title :
Three-port interferometer in silicon-on-insulator for wavelength monitoring and displacement measurement
Author :
Harmsma, Peter ; Staats, John-Paul ; Cascio, Dario Lo ; Cheng, Lun
Author_Institution :
TNO, Delft, Netherlands
Abstract :
We report on the first 3-port interferometer fabricated in Silicon-On-Insulator (SOI) waveguide technology. The integrated device has the benefits of intrinsic mechanical stability, small size, a form factor suitable for accurate temperature control, and accurate definition of optical path length difference.
Keywords :
displacement measurement; light interferometers; silicon-on-insulator; displacement measurement; optical path length difference; silicon-on-insulator; three-port interferometer; wavelength monitoring; Fiber gratings; Optical fibers; Optical interferometry; Optical reflection; Silicon on insulator technology;
Conference_Titel :
Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
Conference_Location :
Munich
Print_ISBN :
978-1-4577-0533-5
Electronic_ISBN :
Pending
DOI :
10.1109/CLEOE.2011.5943282
