Title :
An approach to improve the precision of the grating interferometer measurement
Author :
Li, Shuqiu ; Liu, Shufen ; Xia, Liang ; Zheng, Wanbo ; Wang, Xiaoyan
Author_Institution :
Coll. of Comput. Sci. & Technol., Jilin Univ., Changchun, China
Abstract :
A grating interferometer may be applied to measure the distance of equipment moving. However, some characteristics and process techniques of grating interferometer restrict the measurement precision to get improved. Based on an overall review of model and a method of subdivision and thorough analysis of the factors influencing measurement precision, this paper proposes an approach to improve measurement precision: 160 subdivision of MCS51 single chip micro computer. With the application to grating interferometer, this approach is proved to be more feasible and reliable by table-checking.
Keywords :
computerised instrumentation; diffraction gratings; interferometers; microprocessor chips; MCS51 single chip micro computer; equipment moving; grating interferometer measurement; measurement precision:; table-checking; Application software; Circuits; Computer applications; Educational institutions; Frequency measurement; Gratings; Phase measurement; Position measurement; Semiconductor device measurement; Signal analysis; grating; interferometer; subdivision;
Conference_Titel :
Computer-Aided Industrial Design and Conceptual Design, 2008. CAID/CD 2008. 9th International Conference on
Conference_Location :
Kunming
Print_ISBN :
978-1-4244-3290-5
Electronic_ISBN :
978-1-4244-3291-2
DOI :
10.1109/CAIDCD.2008.4730647
