DocumentCode :
2074752
Title :
Dry-film technology as a standard process for passive optical alignment of Silicon Photonics Devices
Author :
Kopp, Christophe ; Bernabé, Stéphane ; Philippe, Paul
Author_Institution :
LETI, CEA, Grenoble
fYear :
2009
fDate :
26-29 May 2009
Firstpage :
1914
Lastpage :
1919
Abstract :
Packaging of optoelectronic devices has always been a bottleneck for mass production. Today, it is still the case for silicon photonics devices. Intrinsically, the technology of silicon nanowires integrated onto SOI electronic integrated circuits allows the same kind of cost reduction as the one encountered in the microelectronic industry. However, smart solutions have to be proposed in order not to lose this benefit because of the use of non suitable packaging architectures. In this paper, we present a low-cost, mass production compatible and easy-to-transfer technique that allows optical fibers to be passively aligned in front of silicon photonics devices´ optical I/Os. This technique is based on the use of dry-film structures that enable optical fibers to be positioned with accuracy below 5 mum. Combined with optical input like photodiodes or with I/Os made of vertical grating coupler, this approach is a promising one for achieving future low cost integrated optical devices. Moreover, the concept could be extended to multichannel devices used for parallel optics links.
Keywords :
electronics packaging; elemental semiconductors; integrated optoelectronics; mass production; nanoelectronics; nanophotonics; nanowires; optical fibres; silicon; silicon compounds; silicon-on-insulator; SOI electronic integrated circuit integration; Si; Si-SiO2; dry-film technology; mass production; microelectronic industry; optical I/O; optoelectronic device packaging; parallel optics link; passive optical fiber alignment; photodiode; silicon nanowire technology; silicon photonic device; vertical grating coupler; Costs; Electronics packaging; Integrated circuit packaging; Integrated circuit technology; Mass production; Optical devices; Optical fibers; Optoelectronic devices; Photonics; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Components and Technology Conference, 2009. ECTC 2009. 59th
Conference_Location :
San Diego, CA
ISSN :
0569-5503
Print_ISBN :
978-1-4244-4475-5
Electronic_ISBN :
0569-5503
Type :
conf
DOI :
10.1109/ECTC.2009.5074281
Filename :
5074281
Link To Document :
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