DocumentCode
2074973
Title
Micromachining of lateral field emission devices
Author
Milanovic, V. ; Teasdale, D.A. ; Doherty, L. ; Parsa, S. ; Chen Zhang ; Pister, K.S.J.
Author_Institution
Univ. of California, Berkeley, CA, USA
fYear
2000
fDate
2-4 May 2000
Abstract
The authors demonstrate a range of applications of micromachining and micromechanical systems in achieving efficient and tunable field emission devices, and improving their ease of integration.
Keywords
electron field emission; micromachining; microwave devices; lateral field emission devices; micromachining; micromechanical systems; tunable field emission devices; Actuators; Diodes; Electrodes; Etching; Fabrication; Micromachining; Micromechanical devices; Oxidation; Vacuum technology; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Electronics Conference, 2000. Abstracts. International
Conference_Location
Monterey, CA, USA
Print_ISBN
0-7803-5987-9
Type
conf
DOI
10.1109/OVE:EC.2000.847467
Filename
847467
Link To Document