Title :
The model of the thermoisolated area of the thermoresistive transducer
Author :
Osinov, Sergey N.
Author_Institution :
SPI "Analog", Kiev, Ukraine
Abstract :
The physics processes that take place in the multifunctional thermoresistive transducer were considered. For presented processes it was proposed to synthesize the structures based on principles of the quasianalog modeling and to use these structures for the theoretical model for the determination of the deformations in the base sensitive element of the transducer, solution the equation of the stability and the thermostability of the dielectric membrane of the sensitive element.
Keywords :
deformation; mechanical stability; micromechanical devices; temperature sensors; thermal stability; transducers; base sensitive element; deformations determination; dielectric membrane stability; physics processes; quasianalog modeling; structures synthesis; thermoisolated area model; thermoresistive transducer; thermostability; Dielectric substrates; Heating; Humans; Micromechanical devices; Physics; Resistors; Temperature sensors; Thermal stability; Thermoresistivity; Transducers;
Conference_Titel :
Electron Devices and Materials, 2002. Proceedings. 3rd Annual 2002 Siberian Russian Workshop on
Print_ISBN :
5-7782-0380-2
DOI :
10.1109/SREDM.2002.1024312
