• DocumentCode
    2075771
  • Title

    Investigation of performance limiting factors of sub-10nm III-V FinFETs

  • Author

    Peijie Feng ; Narayanan, Sudarshan ; Pandey, Shesh Mani ; Sahu, Bhagawan ; Benistant, Francis ; Towie, Ewan ; Alexander, Craig ; Amoroso, Salvatore M. ; Asenov, Asen

  • Author_Institution
    Global Foundries Inc., Malta, NY, USA
  • fYear
    2015
  • fDate
    26-28 Jan. 2015
  • Firstpage
    105
  • Lastpage
    108
  • Abstract
    As scaling of transistor continues, there is strong impetus to replace Si with attractive alternate channel materials like InGaAs that would provide high on-current at low voltages. However, many key technology issues need to be addressed and in this paper, we present a rigorous investigation into the performance limiting factors of III-V FinFETs using a 3D Monte-Carlo simulation methodology.
  • Keywords
    III-V semiconductors; MOSFET; Monte Carlo methods; elemental semiconductors; gallium arsenide; indium compounds; silicon; 3D Monte-Carlo simulation; InGaAs; Si; channel materials; size 10 nm; transistor scaling; FinFETs; Potential well; Predictive models; Semiconductor process modeling; Solid modeling; Three-dimensional displays; III-V FinFETs; Monte Carlo simulation; TCAD; nanoscale devices; quantum corrections;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultimate Integration on Silicon (EUROSOI-ULIS), 2015 Joint International EUROSOI Workshop and International Conference on
  • Conference_Location
    Bologna
  • Type

    conf

  • DOI
    10.1109/ULIS.2015.7063784
  • Filename
    7063784