Title :
Surface structure and optical properties of Ti-diffused LiNbO3 waveguides
Author :
Kalabin, Ivan E. ; Grigorieva, Tatiana I. ; Pokrovsky, Lev D. ; Sheglov, Dinitriy V. ; Shevtsov, Denis I. ; Atuchin, Victor V.
Author_Institution :
Inst. of Semicond. Phys., Novosibirsk, Russia
Abstract :
The topmost surface of crystal during Ti-indiffused LiNbO3 waveguide preparation was studied using atomic force microscopy and high energy electron diffraction. The formation of the flat terraces with height step ∼0.24nm as a result of high temperature annealing has been detected. The global changing of surface morphology induced by Ti diffusing was observed. No new phase formation on the surface was detected.
Keywords :
annealing; atomic force microscopy; lithium compounds; optical waveguides; surface diffusion; surface morphology; titanium; LiNbO3:Ti; atomic force microscopy; high energy electron diffraction; high temperature annealing; optical properties; phase formation; surface morphology; surface structure; waveguide preparation; Atom optics; Atomic force microscopy; Electron microscopy; Electron optics; Optical diffraction; Optical surface waves; Optical waveguides; Surface morphology; Surface structures; Surface waves;
Conference_Titel :
Electron Devices and Materials, 2002. Proceedings. 3rd Annual 2002 Siberian Russian Workshop on
Print_ISBN :
5-7782-0380-2
DOI :
10.1109/SREDM.2002.1024317
