Title :
A complex neutralization of gaseous blending containg UF6 and BRF3
Author :
Zimin, B.M. ; Rudnikov, A.I. ; Torgunakov, Ju.B. ; Amelina, G.N. ; Gordienko, V.V. ; Jerin, I.I. ; Usov, V.F.
Author_Institution :
Tomsk Politechnical University
fDate :
26 Jun-3 Jul 2001
Keywords :
Aluminum; Chemical products; Chemistry; Electromagnetic wave absorption; Equations; Gases; Hafnium; Kinetic theory; Solids; Temperature distribution;
Conference_Titel :
Science and Technology, 2001. KORUS '01. Proceedings. The Fifth Russian-Korean International Symposium on
Print_ISBN :
0-7803-7008-2
DOI :
10.1109/KORUS.2001.975211
