Title :
Micromechanical calibrating leak made by methods of microtechnologies
Author :
Pakkonen, Alexander V.
Author_Institution :
R&D Lab, Saint-Petersburg State Tech. Univ., Russia
Abstract :
The helium leak construction and technological route of its fabrication are presented. The set of devices was made and their characteristics were investigated. There are supposed to use fabricated devices as the standard at calibration helium detectors.
Keywords :
calibration; gas sensors; helium; leak detection; microsensors; fabrication technological route; helium detectors; helium leak construction; micromechanical calibration; microtechnology; Anisotropic magnetoresistance; Biomembranes; Calibration; Detectors; Helium; Laboratories; Leak detection; Manufacturing; Micromechanical devices; Research and development;
Conference_Titel :
Electron Devices and Materials, 2002. Proceedings. 3rd Annual 2002 Siberian Russian Workshop on
Print_ISBN :
5-7782-0380-2
DOI :
10.1109/SREDM.2002.1024320
