Title :
The investigation of main characteristics of membrane thermal sensors based on silicon
Author :
Apasova, Tatyana A. ; Lobach, Oleg V. ; Popova, Maria V. ; Poplavnoy, Alexey A.
Author_Institution :
Novosibirsk State Tech. Univ., Russia
Abstract :
The silicon thermoelectrical sensor measuring small heat flows has been designed. The first test party has been fabricated. Sensor test methods have been developed and carried out, topology defects have been reveal. Output characteristics of the sensor have been received.
Keywords :
silicon; temperature sensors; thermocouples; heat flows; membrane thermal sensors; sensor test; silicon thermoelectrical sensor; topology defects; Biomembranes; Fluid flow measurement; Sensor phenomena and characterization; Silicon; Temperature sensors; Testing; Thermal resistance; Thermal sensors; Topology; Voltage;
Conference_Titel :
Electron Devices and Materials, 2002. Proceedings. 3rd Annual 2002 Siberian Russian Workshop on
Print_ISBN :
5-7782-0380-2
DOI :
10.1109/SREDM.2002.1024325
