Title :
Thin films of solid electrolyte BaO(CeO2)0.9(Nd2O3)0.1
Author :
Kozlov, Alexander G. ; Udod, Alexey N. ; Turkov, Vitaly V.
Author_Institution :
Inst. of Sensor Microelectron., Russian Acad. of Sci., Omsk, Russia
Abstract :
In this paper the results of investigation of the thin films of the solid electrolyte BaO(CeO2)0.9(Nd2O3)0.1 are presented. The thin films of the solid electrolyte have been made by the thermal resistive sputtering on the silicon and alumina substrates. The Raman spectra of these thin films are studied. The analysis of these spectra shows that the structure of the obtained thin films of the solid electrolyte BaO(CeO2)0.9(Nd2O3)0.1 are like the structure of bulk samples of this electrolyte. The high temperature dependence of conductivity of the thin films of the solid electrolyte BaO(CeO2)0.9(Nd2O3)0.1 is investigated. In terms of this dependence the values of the activation energy for conductivity are determined.
Keywords :
Raman spectra; aluminium compounds; barium compounds; cerium compounds; electrical conductivity; neodymium compounds; silicon; solid electrolytes; sputter deposition; BaO(CeO2)0.9(Nd2O3)0.1; Raman spectra; activation energy; conductivity characteristic; solid electrolyte; spectral analysis; thermal resistive sputtering; thin films; Conductivity; Hydrogen; Microelectronics; Neodymium; Silicon; Solids; Sputtering; Temperature; Thin film sensors; Transistors;
Conference_Titel :
Electron Devices and Materials, 2002. Proceedings. 3rd Annual 2002 Siberian Russian Workshop on
Print_ISBN :
5-7782-0380-2
DOI :
10.1109/SREDM.2002.1024328
