Title :
Controllable bumps and holes fabrication on the surface of fused silica by processing bulk material with ultrashort laser pulses
Author :
Oshemkov, Sergey ; Kruglyakov, Vladimir ; Klaesges, Ralph ; Mengel, Markus
Author_Institution :
Carl Zeiss Group, Carl Zeiss SMS Ltd., Karmiel, Israel
Abstract :
In this paper we report the possibility of fabricating nanometre scale controllable bumps and holes on the surface of fused silica without damaging the sample surface as a result of processing the bulk material with focused ultrashort laser pulses.
Keywords :
laser materials processing; nanofabrication; optical pulse generation; silicon compounds; SiO2; bulk material processing; controllable bumps; focused ultrashort laser pulses; fused silica surface; holes fabrication; nanometre scale; Laser modes; Materials; Measurement by laser beam; Silicon compounds; Surface emitting lasers; Surface treatment;
Conference_Titel :
Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
Conference_Location :
Munich
Print_ISBN :
978-1-4577-0533-5
Electronic_ISBN :
Pending
DOI :
10.1109/CLEOE.2011.5943357
