• DocumentCode
    2076348
  • Title

    Controllable bumps and holes fabrication on the surface of fused silica by processing bulk material with ultrashort laser pulses

  • Author

    Oshemkov, Sergey ; Kruglyakov, Vladimir ; Klaesges, Ralph ; Mengel, Markus

  • Author_Institution
    Carl Zeiss Group, Carl Zeiss SMS Ltd., Karmiel, Israel
  • fYear
    2011
  • fDate
    22-26 May 2011
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    In this paper we report the possibility of fabricating nanometre scale controllable bumps and holes on the surface of fused silica without damaging the sample surface as a result of processing the bulk material with focused ultrashort laser pulses.
  • Keywords
    laser materials processing; nanofabrication; optical pulse generation; silicon compounds; SiO2; bulk material processing; controllable bumps; focused ultrashort laser pulses; fused silica surface; holes fabrication; nanometre scale; Laser modes; Materials; Measurement by laser beam; Silicon compounds; Surface emitting lasers; Surface treatment;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Europe (CLEO EUROPE/EQEC), 2011 Conference on and 12th European Quantum Electronics Conference
  • Conference_Location
    Munich
  • ISSN
    Pending
  • Print_ISBN
    978-1-4577-0533-5
  • Electronic_ISBN
    Pending
  • Type

    conf

  • DOI
    10.1109/CLEOE.2011.5943357
  • Filename
    5943357
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2076348