Title :
Gas-phase technology and structure of films based on C60 fullerene
Author :
Erdinsky, Alexander S. ; Shevtsov, Yuri V. ; Chun, Hui-Gon ; Jeong, Soo-Jong
Author_Institution :
Dept. of Semicond. Devices & Microelectron., Novosibirsk State Tech. Univ., Russia
fDate :
26 Jun-3 Jul 2001
Abstract :
The technology of C60 fullerite film preparation by means of gas-phase deposition and the structure of the films are described. A flow three-channel set-up was used to obtain fullerene films. The films were deposited in an inert gas flow under reduced pressure onto a cooled silicon or sapphire substrate placed inside the reaction chamber. This set-up allows one to obtain films of pure fullerenes and to synthesise films from fullerene compounds and doped fullerenes. The film structure was investigated by FESEM and SEM techniques. All samples show columnar structure with a high level of porosity. The synthesis of fullerene-based films for use in electronics is shown to be promising. For example, experiments confirm the possibility of using fullerene films to produce humidity and thermal sensors. It is also possible to employ the sensitivity of these films to isostatic pressure. Experiments with C60-Cu-J films shown quite strong dependence on the pressure of different sorts of medium-gases that could be used as gas-sensitive sensors. The structure and preparation technology of resistive sensors based on fullerene films are described
Keywords :
electric sensing devices; field emission electron microscopy; fullerene compounds; fullerene devices; fullerenes; gas sensors; humidity sensors; pressure sensors; scanning electron microscopy; vapour deposition; Al2O3; C60; C60 fullerite films; C60-Cu-J films; FESEM; SEM; Si; columnar structure; cooled silicon substrate; doped fullerenes; film structure; flow three-channel set-up; fullerene compounds; fullerene films; gas-phase deposition; humidity sensors; inert gas flow; pressure sensitivity; reaction chamber; reduced pressure; resistive sensors; sapphire substrate; sensor application; sensor electronics; thermal sensors; Chemicals; Chemistry; Materials science and technology; Microelectronics; Nanostructured materials; Semiconductor devices; Semiconductor films; Silicon; Substrates; Superconducting films;
Conference_Titel :
Science and Technology, 2001. KORUS '01. Proceedings. The Fifth Russian-Korean International Symposium on
Conference_Location :
Tomsk
Print_ISBN :
0-7803-7008-2
DOI :
10.1109/KORUS.2001.975248