Generating process model from feature-based design model for surface micromachining device

The way to obtain the manufacturing information from the design model is a key link for MEMS Top-Down design method. This paper concentrates on how to derive a verified process model of surface micromachining device, in the meantime, revising the design model for better manufacturability. After design features combination procedure, the rough process model is derived by the geometry elements operation between layers. Then, on the basis of the rough model, the precise process model is constructed by means of restriction features mapping and model reconstruction method.