• DocumentCode
    2078658
  • Title

    Physical Lumped Modelling of Thin-Film MIM Capacitors

  • Author

    Do Ky, H. ; Meszaros, S. ; Cuhaci, M. ; Syrett, B.A.

  • Author_Institution
    Communications Research Centre, P. O. Box 11490, Station H, Ottawa, Ontario, K2H 8S2, Canada
  • Volume
    2
  • fYear
    1990
  • fDate
    9-13 Sept. 1990
  • Firstpage
    1269
  • Lastpage
    1275
  • Abstract
    To demonstrate the accuracy and versatility of the physical lumped modelling technique, metal-insulator-metal (MIM) capacitors on 254 ¿m substrates are studied and characterized. The results will show that the proposed model is capable of representing MIM capacitors, having values from 0.47 to 20 pF, in the frequency range of 0.5 to 26.5 GHz. An important benefit of this method is that all parameters in the model are computed from the geometry of the capacitors using closed-form expressions; therefore, the model is easily adapted to existing microwave CAD packages for faster and more precise simulation and layout.
  • Keywords
    Closed-form solution; Computational geometry; Frequency; MIM capacitors; Metal-insulator structures; Microwave theory and techniques; Packaging; Solid modeling; Substrates; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 1990. 20th European
  • Conference_Location
    Budapest, Hungary
  • Type

    conf

  • DOI
    10.1109/EUMA.1990.336241
  • Filename
    4136178
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2078658