Title :
Complex electron wave reconstruction using parameter estimation
Author_Institution :
Fac. of Appl. Phys., Delft Univ. of Technol., Netherlands
Abstract :
A new method is proposed for the reconstruction of the complex valued exit wave of a periodic specimen in a transmission electron microscope. The method uses a series of images recorded at different defoci. From these inherently noisy images the parameters defining the wave are estimated. The method keeps the number of parameters as small as possible. In addition, in simulations, if has been found to always produce the best fitting exit wave estimate to the recorded images
Keywords :
Fourier analysis; Poisson distribution; convergence of numerical methods; image reconstruction; image sequences; least squares approximations; maximum likelihood estimation; transfer functions; transmission electron microscopy; 1D images; Poisson distribution; complex Fourier coefficients; complex electron wave reconstruction; complex valued exit wave; convergence; inherently noisy images; initial values; maximum likelihood estimator; modelling; nonlinear optimisation; parameter estimation; periodic specimen; series of images; statistical intensity observations; transfer functions; transmission electron microscope; Bandwidth; Cameras; Electron microscopy; Frequency; Image reconstruction; Maximum likelihood estimation; Parameter estimation; Periodic structures; Reconstruction algorithms; Transfer functions;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 1996. IMTC-96. Conference Proceedings. Quality Measurements: The Indispensable Bridge between Theory and Reality., IEEE
Conference_Location :
Brussels
Print_ISBN :
0-7803-3312-8
DOI :
10.1109/IMTC.1996.507448