Application of pressure swing adsorption to SF6 separation and liquefaction from SF6/N2 mixtures

Discussing the various methods for SF₆ separation from SF₆/N₂ mixtures, pressure swing adsorption (PSA) with a suitable kind of synthetic zeolite, which is expected molecular sieving effect derived from molecular size difference between SF₆ and N₂, has been selected. This molecular sieving effect is confirmed by the difference between two equivalent volumes filled with SF₆ and N₂. A prototype equipment of SF₆ separation and liquefaction, about 1 m cube in size and 150 kg in weight, has been assembled and tested. The ability of gas mixture handling is 13 litters/minute in average and the SF₆ gas content is reduced to 0.06% in separated N₂ which is to be exhausted in the atmosphere