Title :
Nanostructure imaging with sub-THz coherent acoustic phonon pulses
Author :
Daly, B.C. ; Holme, N.C.R. ; Branciard, C. ; Norris, Theodore B. ; Pau, S. ; Tennant, D.M. ; Taylor, J.A. ; Bower, J.E.
Author_Institution :
Center for Ultrafast Opt. Sci., Michigan Univ., Ann Arbor, MI
Abstract :
We describe a novel imaging technique that employs coherent acoustic phonon pulses which are generated and detected by ultrafast optical methods. Sub-micron resolution images of Al lines lithographically etched on a Si substrate are shown
Keywords :
aluminium; etching; high-speed optical techniques; lithography; nanostructured materials; phonons; submillimetre wave imaging; ultrasonic measurement; Al; Si; Si substrate; Sub-micron resolution images; acoustic phonon pulses; coherent phonon pulses; lithographically etched aluminum; nanostructure imaging; picosecond ultrasonics; sub-THz phonon pulses; ultrafast optical methods;
Conference_Titel :
Quantum Electronics Conference, 2004. (IQEC). International
Conference_Location :
San Francisco, CA
Print_ISBN :
1-55752-778-4
