Title :
Optical reflective filter with comb-drive nickel micromirror for optical fiber communication
Author :
Akimoto, Koji ; Uenishi, Yuji ; Honma, Kazuharu ; Nagaoka, Shinji
Author_Institution :
NTT Opto-Electron. Labs., Tokyo, Japan
Abstract :
A novel nickel micromirror with an electrostatic comb-drive actuator has been developed. It is fabricated by nickel surface micromachining, which features a thick photoresist molding process and nickel electroplating. It has a precise controllability and a wide tuning range. As an example of an application to optical communications, an optical reflective filter, which is an etalon constructed of a flat-end optical fiber facet and the micromirror, is demonstrated
Keywords :
micromachining; mirrors; nickel; optical fibre communication; optical fibre filters; Ni; controllability; electroplating; electrostatic comb-drive actuator; etalon; fabrication; nickel micromirror; optical fiber communication; optical reflective filter; photoresist molding; surface micromachining; tuning range; Controllability; Electrostatic actuators; Micromachining; Micromirrors; Nickel; Optical fiber communication; Optical fiber filters; Optical filters; Optical tuning; Resists;
Conference_Titel :
Electronic Components and Technology Conference, 1997. Proceedings., 47th
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-3857-X
DOI :
10.1109/ECTC.1997.606234
