The fabrication and characterization of nano-aperture VCSEL array head for high density near-field optical data storage

Author

Young-Joo Kim ; Kurihara, K. ; Suzuki, K. ; Yamaguchi, A. ; Goto, K.

Author_Institution

Dept. of Inf. & Commun. Technol., Tokai Univ., Kanagawa, Japan

fYear

2000

fDate

14-17 May 2000

Firstpage

42

Lastpage

45

Abstract

A 2D nano-aperture VCSEL array head of near-field optics was studied with the formation of small aperture on the VCSEL surface after the deposition of dielectric and metal films. Its optical properties were also characterized to apply the VCSEL array for the near-field optical memory system of higher data capacity and speed. In this study, we could produce very small aperture of around 50 nm in diameter successfully using a focused ion beam (FIB) method, and get the reasonable increasement in the laser power with the formation of nano-aperture on each VCSEL emitting surface.

Keywords

focused ion beam technology; nanotechnology; optical disc storage; semiconductor laser arrays; surface emitting lasers; 2D nano-aperture VCSEL array head; 50 nm; VCSEL emitting surface; VCSEL surface; data capacity; dielectric films; focused ion beam method; high density near-field optical data storage; laser power; metal films; nano-aperture; nano-aperture VCSEL array head fabrication; near-field optical memory system; near-field optics; optical properties; small aperture; very small aperture; Apertures; Dielectric films; Ion beams; Optical arrays; Optical device fabrication; Optical films; Particle beam optics; Stimulated emission; Surface emitting lasers; Vertical cavity surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical Data Storage, 2000. Conference Digest

Conference_Location

Whisler, BC, Canada

Print_ISBN

0-7803-5950-X

Type

conf

DOI

10.1109/ODS.2000.847975

Filename

847975