Title :
2-D numerical simulation of electrostatic micrometer torque
Author :
Barba, P. Di ; Savini, A. ; Wiak, S.
Author_Institution :
Pavia Univ., Italy
Abstract :
The mathematical model of an electrostatic position microactuator is formulated. Both circuit and 2-D field models are presented and discussed. The micromotor is investigated at steady state under various supply conditions and considering different materials, for a given device geometry. The torque-angle curve is calculated, as well as the electric field distribution along the air gap; design considerations are accordingly drawn
Keywords :
actuators; electric fields; finite element analysis; lumped parameter networks; small electric machines; synchronous motors; 2-D field models; 2-D numerical simulation; air gap; circuit models; device geometry; electric field distribution; electrostatic micrometer torque; electrostatic position microactuator; finite element model; lumped parameters model; materials; mathematical model; steady state; supply conditions; synchronous micromotor; torque-angle curve;
Conference_Titel :
Computation in Electromagnetics, 1994. Second International Conference on
Conference_Location :
London
Print_ISBN :
0-85296-609-1
DOI :
10.1049/cp:19940058
