Study of digital silicon piezoresistive pressure sensor with high precision

In order to resolve the temperature-drift problem existed in pressure sensor, a compound technique of microelectronic and nonlinearity software compensation is used for the fabrication of the digital pressure sensor. In actual application, this sensor has many advantages, such as simple structure, small volume, light weight, high precision, good stability, and broad temperature range. It realizes the accurate conversion between the temperature and the pressure. Comparing with the actual pressure, the maximum measurement error and relative error for the calculated pressure within 49kPa –110kPa and −40□∼60□are 0.03kPa and 0.55%, respectively.