DocumentCode
2084714
Title
Mechanism of adaptation of microelectronics manufacturing to market
Author
Shishkin, Gennady ; Tsyganov, Vladimir
Author_Institution
Special Constr. Bur., Acad. of Sci., Moscow, Russia
fYear
2001
fDate
12-17 Feb. 2001
Firstpage
119
Lastpage
120
Abstract
This paper presents the results of research on intelligent mechanisms for manufacturing system operation and their development to establish flexible microelectronic manufacturing systems.
Keywords
CAD/CAM; flexible manufacturing systems; integrated circuit manufacture; intelligent control; production engineering computing; CAD/CAM; adaptive mechanism; flexible microelectronic manufacturing systems; intelligent mechanism; Chemical elements; Control systems; Flexible manufacturing systems; Information systems; Intelligent control; Intelligent systems; Manufacturing systems; Microelectronics; Organizing; Production systems;
fLanguage
English
Publisher
ieee
Conference_Titel
CAD Systems in Microelectronics, 2001. CADSM 2001. Proceedings of the 6th International Conference. The Experience of Designing and Application of
Conference_Location
Lviv-Slavsko, Ukraine
Print_ISBN
966-553-079-8
Type
conf
DOI
10.1109/CADSM.2001.975770
Filename
975770
Link To Document