Title :
Mechanism of adaptation of microelectronics manufacturing to market
Author :
Shishkin, Gennady ; Tsyganov, Vladimir
Author_Institution :
Special Constr. Bur., Acad. of Sci., Moscow, Russia
Abstract :
This paper presents the results of research on intelligent mechanisms for manufacturing system operation and their development to establish flexible microelectronic manufacturing systems.
Keywords :
CAD/CAM; flexible manufacturing systems; integrated circuit manufacture; intelligent control; production engineering computing; CAD/CAM; adaptive mechanism; flexible microelectronic manufacturing systems; intelligent mechanism; Chemical elements; Control systems; Flexible manufacturing systems; Information systems; Intelligent control; Intelligent systems; Manufacturing systems; Microelectronics; Organizing; Production systems;
Conference_Titel :
CAD Systems in Microelectronics, 2001. CADSM 2001. Proceedings of the 6th International Conference. The Experience of Designing and Application of
Conference_Location :
Lviv-Slavsko, Ukraine
Print_ISBN :
966-553-079-8
DOI :
10.1109/CADSM.2001.975770
