DocumentCode
2084908
Title
Tuning of vibrating micromechanical resonators using a focused ion beam
Author
Moore, D.F. ; Syms, R.R.A.
Author_Institution
Dept. of Eng., Cambridge Univ., UK
fYear
2000
fDate
2000
Firstpage
42430
Lastpage
42434
Abstract
The permanent tuning of the resonant frequency of in-plane vibrating micromechanical resonators is discussed, with particular reference to the tuning of the suspension stiffness rather than tuning of the mass. Iterative frequency tuning of laterally resonant electrostatic comb-drive microactuators by focused ion beam machining is demonstrated
Keywords
vibrations; FIB machining; Si; electrostatic comb-drive microactuators; focused ion beam; iterative frequency tuning; laterally resonant microactuators; permanent tuning; resonant frequency; suspension stiffness; vibrating micromechanical resonators;
fLanguage
English
Publisher
iet
Conference_Titel
Demonstrated Micromachining Technologies for Industry (Ref. No. 2000/032), IEE Seminar on
Conference_Location
Birmingham
Type
conf
DOI
10.1049/ic:20000183
Filename
848115
Link To Document