Suppression of competitive pressure modes in a redundant actuators for a vibration-isolation table

This paper develops a suppression method for an instable states arising in a redundant pneumatic actuators supporting a vibration-isolation table. The instable states are based on inadequate (ill-posed) distribution of forces on the redundant numbers of actuators with respect to the degrees of freedom of table´s motion, and are named Competitive Pressure Modes (CPM). This study proposes an optimal load distribution method for stabilizing and suppressing the Competitive Pressure Modes arising in the vibration-isolation table. This study investigates the validity and the effectiveness of proposed method.