• DocumentCode
    2084980
  • Title

    Microelectrodischarge machining for MEMS applications

  • Author

    Allen, D.M.

  • Author_Institution
    Sch. of Ind. & Manuf. Sci., Cranfield Univ., Bedford, UK
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    42522
  • Lastpage
    42525
  • Abstract
    The accuracy of micro-hole production is dependent on the way in which micro-electrode production is carried out. We are now encountering the problem of material microdefects that are becoming significant in microengineered products made from multicrystalline metals. The quality of the print head is dependent therefore not only on the micromachining processes involved in its fabrication but also on the quality of the material from which it is made. The micro-EDM process is excellent for its precision and resolution capabilities but major challenges are: wear of the micro-electrode during the machining of the nozzles and the very slow machining rate due to the low pulse energy used for individual discharges
  • Keywords
    micromachining; MEMS applications; machining rate; micro-EDM process; micro-electrode production; micro-hole production; microelectrodischarge machining; micromachining processes; multicrystalline metals; print head; pulse energy; resolution; wear;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Demonstrated Micromachining Technologies for Industry (Ref. No. 2000/032), IEE Seminar on
  • Conference_Location
    Birmingham
  • Type

    conf

  • DOI
    10.1049/ic:20000186
  • Filename
    848118