DocumentCode
2084980
Title
Microelectrodischarge machining for MEMS applications
Author
Allen, D.M.
Author_Institution
Sch. of Ind. & Manuf. Sci., Cranfield Univ., Bedford, UK
fYear
2000
fDate
2000
Firstpage
42522
Lastpage
42525
Abstract
The accuracy of micro-hole production is dependent on the way in which micro-electrode production is carried out. We are now encountering the problem of material microdefects that are becoming significant in microengineered products made from multicrystalline metals. The quality of the print head is dependent therefore not only on the micromachining processes involved in its fabrication but also on the quality of the material from which it is made. The micro-EDM process is excellent for its precision and resolution capabilities but major challenges are: wear of the micro-electrode during the machining of the nozzles and the very slow machining rate due to the low pulse energy used for individual discharges
Keywords
micromachining; MEMS applications; machining rate; micro-EDM process; micro-electrode production; micro-hole production; microelectrodischarge machining; micromachining processes; multicrystalline metals; print head; pulse energy; resolution; wear;
fLanguage
English
Publisher
iet
Conference_Titel
Demonstrated Micromachining Technologies for Industry (Ref. No. 2000/032), IEE Seminar on
Conference_Location
Birmingham
Type
conf
DOI
10.1049/ic:20000186
Filename
848118
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