DocumentCode :
2084980
Title :
Microelectrodischarge machining for MEMS applications
Author :
Allen, D.M.
Author_Institution :
Sch. of Ind. & Manuf. Sci., Cranfield Univ., Bedford, UK
fYear :
2000
fDate :
2000
Firstpage :
42522
Lastpage :
42525
Abstract :
The accuracy of micro-hole production is dependent on the way in which micro-electrode production is carried out. We are now encountering the problem of material microdefects that are becoming significant in microengineered products made from multicrystalline metals. The quality of the print head is dependent therefore not only on the micromachining processes involved in its fabrication but also on the quality of the material from which it is made. The micro-EDM process is excellent for its precision and resolution capabilities but major challenges are: wear of the micro-electrode during the machining of the nozzles and the very slow machining rate due to the low pulse energy used for individual discharges
Keywords :
micromachining; MEMS applications; machining rate; micro-EDM process; micro-electrode production; micro-hole production; microelectrodischarge machining; micromachining processes; multicrystalline metals; print head; pulse energy; resolution; wear;
fLanguage :
English
Publisher :
iet
Conference_Titel :
Demonstrated Micromachining Technologies for Industry (Ref. No. 2000/032), IEE Seminar on
Conference_Location :
Birmingham
Type :
conf
DOI :
10.1049/ic:20000186
Filename :
848118
Link To Document :
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