Study for Realizing Effective Direct Tool-to-Tool Delivery

Author

Kondo, Hiroshi ; Harada, Mitsuru

Author_Institution

Asyst Shinko Inc., Mie

fYear

2005

fDate

13-15 Sept. 2005

Firstpage

21

Lastpage

24

Abstract

Direct tool-to-tool delivery is one of technical topics for excellent fab performance. Automatic material handling system (AMHS) vendors supply unified OHT systems that can provide direct tool-to-tool delivery routes. But providing such routes is not sufficient to realize direct deliveries. The purpose of our study is to identify remaining issues required to realize direct tool-to-tool delivery. Our conclusions are: (1) AMHS cannot realize direct tool-to-tool delivery by itself without any degradation of fab throughput, and (2) effective algorithms for lot scheduling/dispatching and variability reduction of tool process rate are required to realize it without such degradation

Keywords

dispatching; integrated circuit manufacture; integrated circuit technology; materials handling; scheduling; automatic material handling system vendors; direct tool-to-tool delivery; fab throughput; lot dispatching; lot scheduling; tool process rate; Degradation; Dispatching; Flowcharts; Job shop scheduling; Logic; Materials handling; Scheduling algorithm; Throughput; Vehicles; Virtual manufacturing;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on

Conference_Location

San Jose, CA

Print_ISBN

0-7803-9143-8

Type

conf

DOI

10.1109/ISSM.2005.1513286

Filename

1513286