Title :
The microwave measurement of surface roughness
Author :
Ding, Zhan ; Huang, Jiadong
Author_Institution :
Dept. of Electronic Engineering, Yngzhou Institute of Technology, Yangzhou, 225001, P.R. China
Abstract :
A new principle of microwave measurement of surface roughness has been developed. The new method is based on scattering property of rough surface under microwave energy radiation. The relations between surface roughness and reflected microwave power are found for the first time. A single chip microcomputer is used for processing and displaying the results. This method features real time operation and non-contact inspection as well as ease of applications. Less than 5% measurement erros has been achieved.
Keywords :
Antenna measurements; Dipole antennas; Microstrip antennas; Microwave antennas; Microwave measurements; Optical scattering; Optical surface waves; Rough surfaces; Semiconductor device measurement; Surface roughness;
Conference_Titel :
Microwave Conference, 1993. 23rd European
Conference_Location :
Madrid, Spain
DOI :
10.1109/EUMA.1993.336866
