DocumentCode
2089530
Title
The microwave measurement of surface roughness
Author
Ding, Zhan ; Huang, Jiadong
Author_Institution
Dept. of Electronic Engineering, Yngzhou Institute of Technology, Yangzhou, 225001, P.R. China
fYear
1993
fDate
6-10 Sept. 1993
Firstpage
275
Lastpage
277
Abstract
A new principle of microwave measurement of surface roughness has been developed. The new method is based on scattering property of rough surface under microwave energy radiation. The relations between surface roughness and reflected microwave power are found for the first time. A single chip microcomputer is used for processing and displaying the results. This method features real time operation and non-contact inspection as well as ease of applications. Less than 5% measurement erros has been achieved.
Keywords
Antenna measurements; Dipole antennas; Microstrip antennas; Microwave antennas; Microwave measurements; Optical scattering; Optical surface waves; Rough surfaces; Semiconductor device measurement; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 1993. 23rd European
Conference_Location
Madrid, Spain
Type
conf
DOI
10.1109/EUMA.1993.336866
Filename
4136595
Link To Document