Title :
A best known methodology for transfer machine metrics from technology development facility to high volume manufacturing facility
Author :
Segal, Tomer ; Powell, John ; Assaf, Orit
Author_Institution :
Intel Corp., Lachish
Abstract :
In advanced semi-conductor manufacturing capital equipment depreciation drives the largest cost in producing products. Therefore, it is critical to have the exact amount of machines (or tools). Several parameters dictate machine quantities for a given technology launch to high volume manufacturing, such as: availability, utilization, run rate, synergies with other technologies and time factors. These machine parameters, also known as "machine metrics", must be optimized. This paper presents a best known methodology to transfer the machine metrics from technology development (TD) site to high volume manufacturing (HVM) site in order to minimize the changes in tools\´ quantities forecast
Keywords :
capacity planning (manufacturing); integrated circuit manufacture; production equipment; production facilities; advanced semiconductor manufacturing; capital equipment depreciation; high volume manufacturing facility; machine availability; machine run rate; machine technological synergy; machine time factors; machine utilization; technology development facility; transfer machine metrics; Availability; Costs; Manufacturing; Mathematical model; Performance evaluation; Predictive models; Production; Semiconductor device modeling; Testing; Time factors;
Conference_Titel :
Semiconductor Manufacturing, 2005. ISSM 2005, IEEE International Symposium on
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-9143-8
DOI :
10.1109/ISSM.2005.1513309
