On-wafer single contact S-parameter measurements to 75 GHz: Calibration procedure and measurement system

A measurement system based on coaxial wafer probes has been developed that allows, for the first time, on-wafer measurement of s-parameters over the full frequency range from 45 MHz to 75 GHz (microwave to millimeter wave) with a single probe contact. In addition, it was found that the non-ideal behavior of the on-wafer calibration standards had a significant influence on the measured accuracy at millimeter wave frequencies. The accuracy of the on-wafer s-parameter measurements to 75 GHz, obtained in this measurement system, was improved by the development of a calibration enhancement procedure. This calibration enhancement procedure allows the non-ideal behavior of the on-wafer calibration standards to be accounted for directly in the (HP8510) Network Analyzer 12 term two-port error correction model.