Improvement in transfer capability by PULL logic transfer control

As a result of miniaturized semiconductor devices and complicated processes, hundreds of processing steps are required to make semiconductor devices. Meanwhile, the system LSI production tends to be high-mix low-volume. Under the circumstances, transportation efficiency is significantly affected by how and when lots are transported to the tool, getting their priorities right. In this article, we explain our best method of controlling transportation of the lots, and that we have evaluated improvements in efficiency of transportation